A Simple Fabrication Process Based on Micro-masonry for the Realization of Nanoplate Resonators with Integrated Actuation and Detection Schemes
نویسندگان
چکیده
Citation: Bhaswara A, Keum H, Mathieu F, Legrand B, Kim S, Nicu L and Leïchlé T (2016) A Simple Fabrication Process Based on Micro-masonry for the Realization of Nanoplate Resonators with Integrated Actuation and Detection Schemes. Front. Mech. Eng. 2:1. doi: 10.3389/fmech.2016.00001 a simple Fabrication Process Based on Micro-masonry for the realization of nanoplate resonators with integrated actuation and Detection schemes
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